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Course Detail

EE6601 Advanced Wafer Processing
1. To study deep sub-micron front end process technology
2. To study deep sub-micron back end process technology
3. To study characterization techniques relevant to deep sub-micron process technology

Participants will be exposed to state-of-the-art advanced CMOS process technologies. They will also be exposed to future technology. They will also become more familiar with the relevant diagnostic techniques for process related issues.
Thin film deposition. Dielectrics for CMOS technology. Chemical and mechanical polishing. Lithography and resist technology. Etching process and technology. Backend interconnect technology. Cleaning technology. Process integration. Metrology and analytical techniques
Who Should Attend
This course is aimed for graduate participants and/or practicing engineers who has prior knowledge of MOSFETs and CMOS technology. Suitable for working adults who has a bachelor’s degree in Electrical/Electronics Engineering.
Eligibility Criteria
At least 21 years of age
Have 2 years of full-time work experience in electric power distribution related fields, or have fully discharged full-time NS liability, or are currently employed on a full-time basis.
At least a Bachelor's degree in Physics or in Electrical and/or Electronic Engineering.
Date(s): 14 Jan 2019 to 10 May 2019
Time: Refer to Class and Exam Schedules
Venue: LT27
Closing Date of Registration: 18 Nov 2018
Course Fee Payable:(Inclusive of GST) Refer to the course fee table

E2I No
Academic Units (AU)
Number of AU: 3
Online Registration
Method of Payment
  1. Online Credit/Debit Card Payment (VISA and Mastercard only)
  2. Cash/Cheque/NETS payment at One-Stop@SAC (NTU Main Campus)
Withdrawal & Refund Policy
Once payment is made, applicant is committed to the completion of course. Course fee refunds will not be considered.
Terms and Conditions
  1. Course is subject to a minimum participation number before commencement.
  2. Course is subject to a first-come-first-serve basis.
  3. Registration is non-transferable.
  4. Student must meet all eligibility criteria for admission.
  5. Student is required to complete all assessments for each course.
  6. PaCE@NTU​ reserves the right to change or cancel any course or lecturer due to unforeseen circumstances.
  7. All details are correct at time of dissemination.
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